VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Silicon (Si) wafer after 100 sec 2KV Ar+ ion etch
1
 
NORM
REGULAR
1
0
0
0
0
0
1
 
Silicon (Si) wafer after 100 sec 2KV Ar+ ion etch
2003
5
10
14
46
51
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
101.09
-0.0243307
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
34.99
2076.25
0.31266
0.313078
82.053
0.313078
81.898
0.313074
85.585
0.313071
60.413
0.313068
82.156
0.313065
72.748
0.313061
76.52
0.313058
84.711
0.313055
96.071
0.313051
87.688
0.313048
84.978
0.313045
96.501
0.313041
93.339
0.313038
99.164
0.313035
119.515
0.313032
102.917
0.313028
129.595
0.313025
114.02
0.313022
99.405
0.313018
134.3
0.313015
135.264
0.313012
129.222
0.313008
150.079
0.313005
158.037
0.313002
181.675
0.312999
171.007
0.312995
174.426
0.312992
191.276
0.312989
223.544
0.312985
255.025
0.312982
264.331
0.312979
296.489
0.312976
311.125
0.312972
352.061
0.312969
388.344
0.312966
400.368
0.312962
452.603
0.312959
487.428
0.312956
510.849
0.312952
605.323
0.312949
568.601
0.312946
668.562
0.312943
716.471
0.312939
776.335
0.312936
847.595
0.312933
971.663
0.312929
1038.55
0.312926
981.309
0.312923
1023.96
0.31292
1118.93
0.312916
1174.69
0.312913
1200.18
0.31291
1231.16
0.312906
1252.63
0.312903
1377.56
0.3129
1361.92
0.312896
1395.74
0.312893
1349.04
0.31289
1428.96
0.312887
1486.62
0.312883
1528.33
0.31288
1509.41
0.312877
1557.3
0.312873
1617.92
0.31287
1567.18
0.312867
1716.17
0.312864
1559.34
0.31286
1605.93
0.312857
1730.44
0.312854
1745.71
0.31285
1790.01
0.312847
1944.73
0.312844
1815.56
0.31284
1976.58
0.312837
2069.77
0.312834
2021.09
0.312831
2017.56
0.312827
2076.25
0.312824
1973.46
0.312821
1938.05
0.312817
1909.39
0.312814
1812.72
0.312811
1913.85
0.312808
1837
0.312804
1640.87
0.312801
1613.34
0.312798
1558.02
0.312794
1411.22
0.312791
1375.55
0.312788
1226.66
0.312785
1228.46
0.312781
1184.44
0.312778
1050.86
0.312775
943.133
0.312771
853.163
0.312768
789.849
0.312765
616.064
0.312761
612.616
0.312758
524.509
0.312755
482.044
0.312752
406.447
0.312748
368.91
0.312745
323.163
0.312742
294.811
0.312738
243.925
0.312735
216.668
0.312732
212.765
0.312729
144.732
0.312725
130.485
0.312722
112.567
0.312719
104.763
0.312715
100.468
0.312712
92.548
0.312709
88.079
0.312706
88.463
0.312702
70.378
0.312699
73.323
0.312696
68.106
0.312692
63.074
0.312689
60.948
0.312686
47.912
0.312683
40.956
0.312679
55.766
0.312676
40.829
0.312673
40.825
0.312669
42.914
0.312666
38.378
0.312663
34.99
0.31266
end of experiment
